Development of micro- and millimotors

Abstract

Summary. Modern designs for micromotors are based on hybrid concepts involving the fabrication of the miniaturized components and a subsequent assembly process. Successful examples of such micromotors are the reluctance micromotors introduced by IMM as well as the permanent magnet micromotors developed by Dumed/Kinetron or IMM/Faulhaber, respectively. The present contribution covers the description of these motor principles as well as the development of an integrated micro gear wheel box that can be fabricated by injection moulding or by micro electroplating technologies.

Key Words:

• microtechnology
• micromotor
• LIGA-technology
• micro gear box