1,192
Views
60
CrossRef citations to date
0
Altmetric
Brief Communications

Tetramethylammonium hydroxide poisoning

, , , &
Pages 213-217 | Received 01 Nov 2009, Accepted 15 Jan 2010, Published online: 16 Mar 2010

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (5)

Kazuaki Syutsubo, Tsuyoshi Danshita, Haruhiko Sumino, Akinori Iguchi & Yasuyuki Takemura. (2021) Microbial properties of the granular sludge in a psychrophilic UASB reactor fed with electronics industry wastewater containing organic chemicals. Journal of Environmental Science and Health, Part A 56:5, pages 516-524.
Read now
Tsuyoshi Danshita, Yuma Miyaoka, Norihisa Matsuura, Haruhiko Sumino, Takashi Yamaguchi & Kazuaki Syutsubo. (2018) Influence of tetramethylammonium hydroxide (TMAH) on the microbial properties of anaerobic granular sludge acclimated to isoplophyl alcohol (IPA) wastewater under psychrophilic conditions. Journal of Environmental Science and Health, Part A 53:11, pages 1015-1021.
Read now
Francesco Tortora, Valentina Innocenzi, Marina Prisciandaro, Ida De Michelis, Francesco Vegliò & Giuseppe Mazziotti di Celso. (2018) Removal of tetramethyl ammonium hydroxide from synthetic liquid wastes of electronic industry through micellar enhanced ultrafiltration. Journal of Dispersion Science and Technology 39:2, pages 207-213.
Read now
Sheng-Jie You, Galilee Uy Semblante, Yu-Pu Chen & Tien-Chin Chang. (2015) Combined photocatalysis and membrane bioreactor for the treatment of feedwater containing thin film transistor-liquid crystal display discharge. Environmental Technology 36:21, pages 2681-2690.
Read now

Articles from other publishers (55)

Hyeok Kim, Abdolvahed Noori, Myung Hee Kim, Chungseob Lee, Je-Hyeon Ko, Byung-Kook Hwang, Kibaek Lee & Hyun-Suk Oh. (2024) Biofouling mitigation of a membrane bioreactor for industrial wastewater treatment by quorum quenching. Journal of Membrane Science 690, pages 122198.
Crossref
Chong Leong Gan, Min-Hua Chung, Yung-Sheng Zou, Chen-Yu Huang & Hem Takiar. (2023) Technological sustainable materials and enabling in semiconductor memory industry: A review. e-Prime - Advances in Electrical Engineering, Electronics and Energy 5, pages 100245.
Crossref
Ruixin Zhang, Rui Wang, Jiajun Chang, G. Daniel Sheng & Daqiang Yin. (2023) Neurotoxicity of tetramethylammonium ion on larval and juvenile zebrafish: Effects on neurobehaviors and multiple biomarkers. Journal of Environmental Sciences.
Crossref
Akinori Iguchi, Yasuyuki Takemura, Tsuyoshi Danshita, Takuya Kurihara, Masataka Aoki, Saori Hori, Toru Shigematsu & Kazuaki Syutsubo. (2023) Isolation and physiological properties of methanogenic archaea that degrade tetramethylammonium hydroxide. Applied Microbiology and Biotechnology 107:9, pages 3047-3056.
Crossref
Meredith Evans Seeley & Jennifer M. Lynch. (2023) Previous successes and untapped potential of pyrolysis–GC/MS for the analysis of plastic pollution. Analytical and Bioanalytical Chemistry.
Crossref
Juan Lv, Qi Ni, Jiaqi Dong, Changyuan Ou, Yiqing Cao, Jiong Gan & Fan Xiao. (2023) Effects of influent organic load on TMAH (tetramethylammonium hydroxide) wastewater treatment by anaerobic process. Journal of Environmental Chemical Engineering 11:2, pages 109315.
Crossref
Juyoung Lee, Song Lee, Yongjun Choi & Sangho Lee. (2023) Treatment of Semiconductor Wastewater Containing Tetramethylammonium Hydroxide (TMAH) Using Nanofiltration, Reverse Osmosis, and Membrane Capacitive Deionization. Membranes 13:3, pages 336.
Crossref
Dayoung Ahn, Seonghwan Kim, Panyu Ren, Volker Presser & Choonsoo Kim. (2023) Redox flow desalination for tetramethylammonium hydroxide removal and recovery from semiconductor wastewater. Journal of Industrial and Engineering Chemistry 118, pages 147-154.
Crossref
Josef Diebold, Yasmin Weiß, Stefan Zürcher & Magnus S. Schmidt. (2022) Dataset for density/temperature correlation of tetramethylammonium hydroxide solutions of various concentrations. Data in Brief 45, pages 108679.
Crossref
Valentina Innocenzi, Svetlana B. Zueva, Nicolò Maria Ippolito, Francesco Ferella, Marina Prisciandaro & Francesco Vegliò. (2022) A review of the existing and emerging technologies for wastewaters containing tetramethyl ammonium hydroxide (TMAH) and waste management systems in micro-chip microelectronic industries. Chemosphere 307, pages 135913.
Crossref
G. Murali, Jeevan Kumar Reddy Modigunta, Young Ho Park, Jong-Hoon Lee, Jishu Rawal, Seul-Yi Lee, Insik In & Soo-Jin Park. (2022) A Review on MXene Synthesis, Stability, and Photocatalytic Applications. ACS Nano 16:9, pages 13370-13429.
Crossref
Vasiliy V. Rosen, Orit Gal Garber & Yona Chen. (2022) Iodine determination in mineral water using ICP-MS: Method development and analysis of brands available in Israeli stores. Journal of Food Composition and Analysis 111, pages 104600.
Crossref
Kensuke Echizen, Tsuyoshi Taniguchi, Tatsuya Nishimura & Katsuhiro Maeda. (2022) Well‐Controlled Living Polymerization of Phenylacetylenes in Water: Synthesis of Water‐Soluble Stereoregular Telechelic Poly(phenylacetylene)s. Angewandte Chemie International Edition 61:26.
Crossref
Kensuke Echizen, Tsuyoshi Taniguchi, Tatsuya Nishimura & Katsuhiro Maeda. (2022) Well‐Controlled Living Polymerization of Phenylacetylenes in Water: Synthesis of Water‐Soluble Stereoregular Telechelic Poly(phenylacetylene)s. Angewandte Chemie 134:26.
Crossref
Olha Sysova, Paule Durin, Corinne Gablin, Didier Léonard, Alexandre Téolis, Stéphane Trombotto, Thierry Delair, Dominique Berling, Isabelle Servin, Raluca Tiron, Arnaud Bazin, Jean-Louis Leclercq, Yann Chevolot & Olivier Soppera. (2022) Chitosan as a Water-Developable 193 nm Photoresist for Green Photolithography. ACS Applied Polymer Materials 4:6, pages 4508-4519.
Crossref
Hau-Ming Chang, Shiao-Shing Chen, Shiang-Sheng Hsiao, Wen-Shing Chang, I-Chieh Chien, Chinh Cong Duong & Thi Xuan Quynh Nguyen. (2022) Water reclamation and microbial community investigation: Treatment of tetramethylammonium hydroxide wastewater through an anaerobic osmotic membrane bioreactor hybrid system. Journal of Hazardous Materials 427, pages 128200.
Crossref
Yu-Cheng Liu, Yu-Chen Hu, I.-Ming Chu, Yu-Hong Wei & Shen-Long Tsai. (2022) Biodegradation of tetramethylammonium chloride wastewater and inorganic nitrogen removal by a mixed culture. Journal of Environmental Chemical Engineering 10:1, pages 106931.
Crossref
Jihoon Seo. 2022. Advances in Chemical Mechanical Planarization (CMP). Advances in Chemical Mechanical Planarization (CMP) 503 532 .
Bapanipally Govardhan, Saeed Fatima, Swayampakula Kalyani & Sundergopal Sridhar. (2021) An integrated approach of membrane and resin for processing highly toxic and corrosive tetramethylammonium hydroxide alkali to ultrahigh purity. Journal of Environmental Chemical Engineering 9:5, pages 106125.
Crossref
Christopher E. Shuck, Kimberly Ventura-Martinez, Adam Goad, Simge Uzun, Mikhail Shekhirev & Yury Gogotsi. (2021) Safe Synthesis of MAX and MXene: Guidelines to Reduce Risk During Synthesis. ACS Chemical Health & Safety 28:5, pages 326-338.
Crossref
Monica Serreli, Luigia Petti, Andrea Raggi, Alberto Simboli & Guglielmo Iuliano. (2021) Social life cycle assessment of an innovative industrial wastewater treatment plant. The International Journal of Life Cycle Assessment 26:9, pages 1878-1899.
Crossref
Hugo S. Alvarez, Audrey R. Silva, Luana C. J. Espinola, Alfredo R. Vaz & Jose A. Diniz. (2021) NH 4 OH-B Silicon Texturing of Periodic V-Groove Channels, Upright, and Inverted Pyramids Structures . IEEE Journal of Photovoltaics 11:3, pages 570-574.
Crossref
Tae-Kyoung Kim, Taeyeon Kim, Inae Lee, Kyungho Choi & Kyung-Duk Zoh. (2021) Removal of tetramethylammonium hydroxide (TMAH) in semiconductor wastewater using the nano-ozone H2O2 process. Journal of Hazardous Materials 409, pages 123759.
Crossref
Eleanor Mullen & Michael A. Morris. (2021) Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective. Nanomaterials 11:5, pages 1085.
Crossref
Hyungmin Choi, Jinsu Kim & Changsoo Lee. (2021) Enhancement of methanogenic biodegradation of tetramethylammonium hydroxide wastewater by co-digestion with ethyl lactate wastewater. Environmental Technology & Innovation 21, pages 101372.
Crossref
Jihoon Seo. (2021) A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization. Journal of Materials Research 36:1, pages 235-257.
Crossref
Chih-Kang Huang, Alan H. Hall, Ming-Ling Wu, Chen-Chang Yang, Dong-Zong Hung, Yan-Chiao Mao & Jou-Fang Deng. (2020) Presentations of tetramethylammonium hydroxide dermal exposure and the valuable potential of diphoterine solution in decontamination: a retrospective observational study. BMC Pharmacology and Toxicology 21:1.
Crossref
Jihoon Seo. (2020) A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization. Journal of Materials Research, pages 1-23.
Crossref
Da Tian Chang, Daeryong Park, Jun-Jie Zhu & Huan-Jung Fan. (2019) Assessment of an MnCe-GAC Treatment Process for Tetramethylammonium-Contaminated Wastewater from Optoelectronic Industries. Applied Sciences 9:21, pages 4578.
Crossref
Francesco Ferella, Valentina Innocenzi, Svetlana Zueva, Valentina Corradini, Nicolò M. Ippolito, Ionela P. Birloaga, Ida De Michelis, Marina Prisciandaro & Francesco Vegliò. (2019) Aerobic Treatment of Waste Process Solutions from the Semiconductor Industry: From Lab to Pilot Scale. Sustainability 11:14, pages 3923.
Crossref
Ta-Yuan Chang, Chin-Lin Liu, Kuei-Hung Huang & Hsien-Wen Kuo. (2019) Indoor and Outdoor Exposure to Volatile Organic Compounds and Health Risk Assessment in Residents Living near an Optoelectronics Industrial Park. Atmosphere 10:7, pages 380.
Crossref
Frederik Ceyssens, Marleen Welkenhuysen & Robert Puers. (2019) Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays. Journal of Micromechanics and Microengineering 29:2, pages 027001.
Crossref
Jihoon Seo, S. S. R. K. Hanup Vegi & S. V. Babu. (2019) Post-CMP Cleaning Solutions for the Removal of Organic Contaminants with Reduced Galvanic Corrosion at Copper/Cobalt Interface for Advanced Cu Interconnect Applications. ECS Journal of Solid State Science and Technology 8:8, pages P379-P387.
Crossref
Satoshi Takei. (2018) High volume manufacturing of optical MEMS devices using biomass nano-patterning materials and ecofriendly developable lithography processes. High volume manufacturing of optical MEMS devices using biomass nano-patterning materials and ecofriendly developable lithography processes.
Li-Wei Lu, Yen-Ping Peng & Cheng-Nan Chang. (2018) Applying an activated carbon/silver catalyst to the decomposition of the aqueous solutions of tetramethyl ammonium hydroxide. Journal of the Taiwan Institute of Chemical Engineers 88, pages 130-136.
Crossref
Weiwei Zhang & Adri C. T. van Duin. (2018) Improvement of the ReaxFF Description for Functionalized Hydrocarbon/Water Weak Interactions in the Condensed Phase. The Journal of Physical Chemistry B 122:14, pages 4083-4092.
Crossref
Satoshi Takei. (2018) Green ethanol-developable electron beam lithography processes using positive tone biomass resist material. Green ethanol-developable electron beam lithography processes using positive tone biomass resist material.
Anne-Laure Dalverny, Géraldine Leyral, Florence Rouessac, Laurent Bernaud & Jean-Sébastien Filhol. (2017) Synthesizing and Playing with Magnetic Nanoparticles: A Comprehensive Approach to Amazing Magnetic Materials. Journal of Chemical Education 95:1, pages 121-125.
Crossref
Kimi Nishikawa, Abdul Bari, Abdul Jabbar Khan, Xin Li, Traci Menia, Thomas M. Semkow, Zhichao Lin & Stephanie Healey. (2017) Homogenization of food samples for gamma spectrometry using tetramethylammonium hydroxide and enzymatic digestion. Journal of Radioanalytical and Nuclear Chemistry 314:2, pages 859-870.
Crossref
Satoshi Takei, Naoto Sugino, Makoto Hanabata, Akihiro Oshima, Miki Kashiwakura, Takahiro Kozawa & Seiichi Tagawa. (2017) Ecofriendly ethanol-developable processes for electron beam lithography using positive-tone dextrin resist material. Applied Physics Express 10:7, pages 076502.
Crossref
Benjamin B. Y. Lau, Tracey Yeung, Robert J. Patterson & Leigh Aldous. (2017) A Cation Study on Rice Husk Biomass Pretreatment with Aqueous Hydroxides: Cellulose Solubility Does Not Correlate with Improved Enzymatic Hydrolysis. ACS Sustainable Chemistry & Engineering 5:6, pages 5320-5329.
Crossref
J.C. Liu. 2017. Current Developments in Biotechnology and Bioengineering. Current Developments in Biotechnology and Bioengineering 145 160 .
Satoshi Takei. Fundamental study of green EUV lithography using natural polysaccharide for the use of pure water in developable process. Fundamental study of green EUV lithography using natural polysaccharide for the use of pure water in developable process.
Bing Liu, Kohei Yoshinaga, Jer-Horng Wu, Wei-Yu Chen, Mitsuharu Terashima, Rajeev Goel, Domenico Pangallo & Hidenari Yasui. (2016) Kinetic analysis of biological degradation for tetramethylammonium hydroxide (TMAH) in the anaerobic activated sludge system at ambient temperature. Biochemical Engineering Journal 114, pages 42-49.
Crossref
Richard Peters, Yuanmei Cao, Kim Pollard, Don Pfettscher & Mike Phenis. (2015) Formulation Development for Bosch Etch Residue Removal: Effect of Solvent on Removal Efficiency. International Symposium on Microelectronics 2015:1, pages 000121-000125.
Crossref
Izumi C. Mori, Carlos R. Arias-Barreiro, Apostolos Koutsaftis, Atsushi Ogo, Tomonori Kawano, Kazuharu Yoshizuka, Salmaan H. Inayat-Hussain & Isao Aoyama. (2015) Toxicity of tetramethylammonium hydroxide to aquatic organisms and its synergistic action with potassium iodide. Chemosphere 120, pages 299-304.
Crossref
Seung-Hyun Park, Hae Dong Park & In Jae Shin. (2014) Exposure Characteristics for Chemical Substances and Work Environmental Management in the Semiconductor Assembly Process. Journal of Korean Society of Occupational and Environmental Hygiene 24:3, pages 272-280.
Crossref
Yaoming Wang, Zenghui Zhang, Chenxiao Jiang & Tongwen Xu. (2013) Electrodialysis Process for the Recycling and Concentrating of Tetramethylammonium Hydroxide (TMAH) from Photoresist Developer Wastewater. Industrial & Engineering Chemistry Research 52:51, pages 18356-18361.
Crossref
H. M. Citraningrum, J. C. Liu & J. M. Chern. (2013) Removal of Tetramethylammonium Hydroxide From Solution Using Ion Exchange. IEEE Transactions on Semiconductor Manufacturing 26:2, pages 214-220.
Crossref
Seung‐Hyun Park, Jungsun Park, Ki‐Ho You, Hae‐Chul Shin & Hyun‐Ock Kim. (2013) Tetramethylammonium Hydroxide Poisoning during a Pallet Cleaning Demonstration. Journal of Occupational Health 55:2, pages 120-124.
Crossref
Chi-Hung Liu, Chu-Yun Huang & Chin-Chang Huang. (2012) Occupational Neurotoxic Diseases in Taiwan. Safety and Health at Work 3:4, pages 257-267.
Crossref
Chen-Long Wu, Shih-Bin Su, Hsiao-Yin Lien & How-Ran Guo. (2012) The role of the chemical burns caused by hydroxide ion in the toxicity of dermal exposure to tetramethylammonium ion in a rat model. Burns 38:7, pages 1051-1057.
Crossref
Chen-Long Wu, Shih-Bin Su, Jin-Luh Chen, Cheng-Ping Chang & How-Ran Guo. (2012) Tetramethylammonium ion causes respiratory failure related mortality in a rat model. Resuscitation 83:1, pages 119-124.
Crossref
Hasan Korre, Corey P. Fucetola, Jeremy A. Johnson & Karl K. Berggren. (2010) Development of a simple, compact, low-cost interference lithography system. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 28:6, pages C6Q20-C6Q24.
Crossref
Tae-Kyoung Kim & Kyung-Duk Zoh. (2022) Removal of Tetramethylammonium Hydroxide (Tmah) During the Uv-Led/H2o2 Reaction: Degassing Effect, Radical Contribution, and Degradation Mechanism. SSRN Electronic Journal.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.