References
- Fan L S, Tai Y C, Muller R S. IC-processed electrostatic micromotors. IEEE Electr Dev 1990; 666–9
- Trimmer W, Jebens R. Harmonic electrostatic motors. Sensors & Actuators 1989; 20: 17–24
- Paratte L, Racine G, de Rooij N F, Bornand E. A rigid ring electrostatic harmonic wobble motor with axial field. Proceedings in Transducers. San Francisco 1991
- Ehrfeld W, Lehr H. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics. Radiat Phys Chem 1995; 45: 349–65
- Lance C T, Bom N. Ultrasonic instrument with micromotor having stator coils on a flexible circuit board. US Patent No. US005240003A
- Lehr H, Abel S, Ehrfeld W, Hagemann B, Kämper K-P, Michel F, Thürigen Ch. Assembly of electromagnetic milliactuators with LIGA-components. Proceedings of the 2nd Japan-France Congress on Mechatronics, Tagamatsu, KagawaJapan, 1994
- Kämper K-P, Ehrfeld W, Hagemann B, Lehr H, Michel F, Schirling A, et al. Electromagnetic permanent micromotor with integrated micro gear box. Proceedings ACTUATOR 96. Bremen 1996
- Ehrfeld W, Lehr H, Michel F, Wolf A, Gruber H-P, Schmid A. Micro electro discharge machining as a technology in micro-machining. Proceedings SPIE Symposium on Micromachining and Microfabrication, Austin, Texas, 1996