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Abstract
Thin polymer films can be prepared by spin coating with thicknesses ranging from nanometers to micrometers. The film thickness is controlled by concentration of the polymer solution, molar mass of the polymer and spinning speed. The patented GYRSET system for spin coating applications provides a fundamental modification. The bell-shaped cover minimizes air turbulences inside the process chamber; therefore, better uniformity of the layer is produced. This leads to highly reproducible results, uniform coverage, and reliable and uniform material application, in particular at lower spin speeds. We focus on the question how does the GYRSET system change the final film thickness. In particular, we have investigated modifications of the existing spin coat equation for solutions of polystyrene dissolved in toluene using the GYRSET system. In addition, we compare homogeneity of films prepared by open spin coating and GYRSET systems.