Complex beam epitaxy of metal oxide films

Abstract

YBa₂Cu₃O₇ films were prepared by the new deposition technique “complex beam epitaxy”. In this technique, metal-EDTA complexes are evaporated by ex- cimer laser ablation. The metal-EDTA complexes are decomposed by heating on the single crystalline (100)SrTiO₃ substrate and form the crystal of metal oxides. The epitaxial relationship between the film and the substrate was determined as [100]YBCO//[100]SrTiO₃ and [001]YBCO//[001]SrTiO₃. There were no peaks for carbon and nitrogen on the AES and EPMA spectra obtained from surface and inside of the resulting samples. On the surface of the samples, sub-micron crystallites of YBa₂Cu₃O₇ were mainly seen. There was an optimum distance between the target and the substrate for good transcription of the target composition to the substrate.

Key words:

• YBa₂Cu₃O₇ films
• Epitaxial growth
• Metal-EDTA complexes
• KrF excimer laser
• Single crystalline (100)SrTiO₃ substrate