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Abstract
The multilayer pyroelectric thin film (MPTF) was composed of a pyroelectric PLT thin film and a gradient thermal insulation layer (GTIL). This GTIL was proposed to improve the surface roughness of the thicker porous films, which consisted of multilayer porous SiO2 films with different porosities. As a result, this MPTF retained the excellent electric properties while greatly intensifying its voltage sensitivity and detectivity by preparing the thick and smooth GTIL. The experimental result also showed that the voltage response of the MPTF with a GTIL thickness of 3μm increased more than 10 times in comparison with one of the PLT film directly deposited on the silicon substrate.