Linear Electrostatic Micromotor on the Basis of Ferroelectric Ceramics

Abstract

The new electromechanical energy conversion principle based on the reversible electrostatic rolling of thin metallic films (petals) on the ferroelectric film surface was described earlier by authors, and new electrostatic micromotor was made that utilizes the mentioned effect. In this paper the motor's active media are the layers of the ferroelectric ceramics (about 100 μ m in thickness). The characteristics of the electrostatic rolling of the petals on the different ceramic surfaces are studied, as well as dynamic characteristics of the micromotors.

It is shown that the use of the antiferroelectric material allows one to reach the specific energy capacitance comparable to that of the micromotors based on the ferroelectric films and to achieve specific power of 30–300 μ W/mm ² .

Keywords:

• Micromotor
• electrostatics
• microelectromechanics
• ferroelectric ceramics