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Abstract
BaTiO 3 /SrTiO 3 , SrZrO 3 /SrTiO 3 and BaTiO 3 /BaZrO 3 artificial superlattices were fabricated by a molecular beam epitaxy process. X-ray diffraction (XRD) reciprocal space maps were performed using high-resolution XRD. All artificial superlattices with the periodicity above 10 unit cells of primitive perovskite lattice showed clear satellite peaks in the XRD pattern and were distorted in the direction of film thickness. The refractive index of the superlattices measured with a spectroscopic ellipsometer showed a maximum at the 10-periodic structure. The BaTiO 3 /SrTiO 3 Superlattices with the 10-periodic structure showed a high dielectric permittivity of ϵ r = 33,000 and the SrZrO 3 /SrTiO 3 superlattices showed artificially induced ferroelectricity. It was clarified that the anisotropic lattice distortion introduced by the strains due to the lattice mismatch was the origin of the unique dielectric characteristics of artificial superlattices.
