Abstract
Ferroelectric (K 0.5 Na 0.5 ) NbO3 (KNN) thin films have been successfully prepared by a metallorganic compound decomposition (MOD) method. The stable KNN precursor solutions were prepared from commercial sodium acetate and potassium acetate and niobium ethoxide synthesized in our laboratory. Uniform and dense KNN thin films were obtained using spin-coating and rapid thermal treatment at 500 ∼ 650°C. KNN thin films possess pure perovskite phase and exhibit (110) preferential orientation. The dielectric constant and dielectric loss of KNN thin films annealed at 600°C are about 219 and 0.07 at 1 kHz, respectively.
Acknowledgments
This work was supported by the National Natural Science Foundation of China (Grant Nos. 60377035 and U0634006).