Self-Sensing Piezoelectric Actuator using Permittivity Detection

Abstract

In positioning applications, the drawbacks of piezoelectric actuators are hysteresis, nonlinearity and creep in piezoelectric displacement. Hence, a feedback control using a displacement sensor is usually essential for a precise positioning. Such displacement sensors hinder device miniaturization, necessitate a complicated configuration, and increase the manufacturing cost. In this study, a self-sensing control system using permittivity change detection was demonstrated. This system is based on the linear relationship between the permittivity and the piezoelectric displacement. This linear relationship was verified experimentally. And we examined the self-sensing positioning control using a real-time permittivity change detection system, and the non-linear piezoelectric property was successfully compensated.

Keywords:

• Piezoelectric actuator
• permittivity
• self-sensing
• permittivity detection
• hysteresis
• self-sensing actuator
• precise positioning