Catalytic Studies of RuO₂ Films Deposited on Ferroelectrics Films by Spin Coating Process

M. Khachane Laboratoire de Chimie du Solide Minéral, Département de Chimie, Faculté des Sciences Semlalia, Université Cadi Ayyad BP, 2390, Marrakech, Maroc; Laboratoire Matériaux & Microélectronique de Provence, –UMR CNRS 6137, Université du Sud Toulon Var–BP 20132, F-83957, La Garde, France

P. Nowakowski Laboratoire Matériaux & Microélectronique de Provence, –UMR CNRS 6137, Université du Sud Toulon Var–BP 20132, F-83957, La Garde, France

S. Villain Laboratoire Matériaux & Microélectronique de Provence, –UMR CNRS 6137, Université du Sud Toulon Var–BP 20132, F-83957, La Garde, France

J. R. Gavarri Laboratoire Matériaux & Microélectronique de Provence, –UMR CNRS 6137, Université du Sud Toulon Var–BP 20132, F-83957, La Garde, France

Ch. Muller Laboratoire Matériaux & Microélectronique de Provence, –UMR CNRS 6137, Université du Sud Toulon Var–BP 20132, F-83957, La Garde, France

I. Luk'Yanchuk Laboratoire de Physique de la Matière Condensée, Université Picardie Jules Vernes Amiens, France

M. Elaatmani Laboratoire de Chimie du Solide Minéral, Département de Chimie, Faculté des Sciences Semlalia, Université Cadi Ayyad BP, 2390, Marrakech, Maroc

A. Outzourhit Laboratoire de Physique du Solide et Couches Minces, Département de Physique, Faculté des Sciences Semlalia, Université Cadi Ayyad BP, 2390, Marrakech, Maroc

A. Zegzouti Laboratoire de Chimie du Solide Minéral, Département de Chimie, Faculté des Sciences Semlalia, Université Cadi Ayyad BP, 2390, Marrakech, Maroc

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Abstract

Films of a catalytic compound (RuO₂) were deposited by spin-coating process on ferroelectric films mainly constituted of SrBi₂Ta₂O₉ (SBT) and Ba₂NaNb₅O₁₅ (BNN) phases. SBT films were deposited by MOCVD method, and BNN films were deposited by sputtering. After thermal treatment under air, these ferroelectric-catalytic systems were characterized by X-ray diffraction and scanning electron microscopy (SEM). SEM images showed that RuO₂ film morphology depended on substrate nature. A study of CH₄ conversion into CO₂ and H₂O was carried out using these catalytic-ferroelectric multilayers: the conversion was analyzed from Fourier Transform Infrared (FT-IR) spectroscopy, at various temperatures. Improved catalytic properties were observed for RuO₂ films deposited on BNN oxide layer.

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Catalytic Studies of RuO₂ Films Deposited on Ferroelectrics Films by Spin Coating Process

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Catalytic Studies of RuO₂ Films Deposited on Ferroelectrics Films by Spin Coating Process