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Abstract
The direct-writing technique by MicroPen provides maskless fabrication method for complex and multilayer structures. In this work, low-temperature co-firing ceramic (LTCC) BST paste was fabricated and structures for high frequency evaluation were formed by MicroPen. The results showed uniform microstructures with some porosity after sintering at 900 °C. The dielectric properties were characterized in the frequency range of 0.5 to 13.5 GHz using coplanar waveguides. The ϵ r and tanδ of the LTCC BST thick film were 57.5–41 and 0.013–0.007 with applied electric field of 0-10 V/μm, respectively at 5 GHz. The tunability obtained was 28 % at 10 V/μm.
Acknowledgment
The work was supported by the project CoNaPo (No. 40135/05, 40116/06) and Nokia Visiting Researcher Scholarship. The authors acknowledge all the financing partners of the CoNaPo project including Premix Oy, Perlos Oyj, Pulse Finland Oy, NOF Co. and the Finnish Funding Agency for Technology and Innovation (Tekes).