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Abstract
This paper introduces the characteristics of the zirconium dioxide (ZrO2) inorganic film deposited by radio-frequency magnetron sputtering. The homogeneously aligned liquid crystal (LC) on ZrO2 layer via ion beam (IB) irradiation at various incident angles was embodied with LC alignment capability and performance. The x-ray photoelectron spectroscopic (XPS) data shows that O-Zr bonds on the ZrO2 surface are broken and induce the van der Waals force for the homogeneous alignment of LCs. That is the van der Waals force, affecting the alignment of the LCs, is verified by the contact angle of the liquid and by the XPS analysis on the ZrO2 thin film. In addition, the advantage of IB alignment method is verified by using atomic force microscope (AFM).