Kinetic theory simulation of LiNbO₃ thin films deposition distribution by pulsed laser deposition

ABSTRACT

In this paper, the progress of LiNbO₃ thin films formation was simulated by kinetic theory method. The whole Plused Laser Deposition (PLD for short) process was considered: LiNbO₃ particles were sublimated to high density plasma after laser erosion and propagated into space and then deposited into thin films. And the thickness of LiNbO₃ thin films was discussed, which reflected the surface roughness and crystal type.

The particles speed and distribution in the plasma were considered and discussed, and the roughness distribution of the films along the radius has been discussed. The thickness change could indicate the growth mode of the films along the radius. The detailed explanation of the PLD experiment was established.

KEYWORDS:

• Films
• plasma
• LiNbO₃
• film thickness

PNAS:

• 68.37.-d
• 52.65.Pp
• 31.15.at
• 68.55.jd

Funding

Project supported by Liaoning Province College student innovation training program (Grant No. 201610147000054); Liaoning Technical University Doctor start-up program (Grant No. 16-1027); The sixth technology innovation program (Grant No. 20160063T).