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Abstract
We have made an attempt to fabricate free standing warpage free PZT thick films of 100 µm thickness by tape casting method. The poly crystalline nature and nanoscale polarization switching of free standing thick film were confirmed using X-ray diffraction technique and piezo force microscopy, respectively. The piezoelectric coefficient (d33) of 100 µm free-standing Pb(Zr0.56Ti0.44)O3 [PZT] thick film was calculated using double beam laser interferometer and found to be 400 pm/V. From the results, it indicates that free-standing PZT thick films are suitable candidate for miniaturization of harvesting device by directly bonding them on microsystem components for microelectromechanical systems (MEMS) applications.
Additional information
Funding
This work was supported by the Department of Science and Technology (DST), New Delhi, which facilitated the establishment of “Nano Functional Materials Technology Centre” (Grant No. SRNM/NAT/02-2005) and supported by Defence Research and Development Organization (DRDO), New Delhi (Grant No. PHY/13-14/286/MSRA/DRDO).