Abstract
Barium titanate (BaTiO3) is a ferroelectric and piezoelectric material with excellent components. Barium titanate film success fully made with various concentration of CeO2 0%, 2%, 4%, and 6% through Chemical Solution Deposition (CSD) method in annealed process at 550βΒ°C for 23.5βhours and the spin coating technique with a speed of 8000βrpm. The results of the crystal properties test showed that the lattice parameters with various concentration of CeO2 0%, 2%, 4%, 6% respectively aβ=βbβ=β4.0491βΓ and cβ=β4.0258βΓ ; aβ=βbβ=β4.06267βΓ and cβ=β4.0355βΓ ; aβ=βbβ=β4.0549βΓ and cβ=β4.0249βΓ ; aβ=βbβ=β4.0547βΓ and cβ=β4.0385βΓ so that the crystal structure is tetragonal. The results of the optical properties test that the index refractive resulted in 1.4842, 1.4508, 1.4917, and 1.5175. The piezoelectric response test gets results of the piezoelectric voltage constant in the range 33.3322β43.1052βVm/N, piezoelectric charge constants in the range 1.4700βΓβ10β7β1.9074βΓβ10β7 C/N and mechanical strain in the range 166.0147 to 329.1333. Based on characterization results and tested, cerium oxide doped barium titanate film have potential to develop being piezoelectric sensor.