One-step method to control the temperature of S and Mo source and its effect on the size and morphology of MoS₂

Abstract

Molybdenum disulfide (MoS₂) is a typical two-dimensional material, which is widely used in many fields because of its excellent electrical and optical properties. In recent years, the high-quality growth of MoS₂ has attracted more and more attention from researchers. Many studies have reported a two-step method for the production of MoS₂ by pre-deposition of molybdenum (Mo) source and then vulcanization, which is cumbersome and time-consuming, and the preparation temperature is mostly above 800 °C, increasing energy consumption and experimental risk. In this paper, S source and Mo source can be distinguished by double temperature zone tube furnace to prepare MoS₂ material in one-step method. The temperatures of S and Mo sources were designed separately, and the effect of each temperature on the quality of MoS₂ was investigated. And the monolayer MoS₂ with high crystalline quality was obtained at a S source temperature of 165 °C and a Mo source temperature of 680 °C. We produce MoS₂ in one-step method at low temperature, which provides a reference for the synthesis of high-quality monolayer MoS₂.

Keywords:

• MoS₂
• chemical vapor deposition
• source
• temperature

Disclosure statement

No potential conflict of interest was reported by the authors.

Additional information

Funding

This work is supported by the “111” Project of China (D17017), the National Natural Science Foundation of China (62174015), and the Project of Education Department of Jilin Province (JJKH20220723KJ).