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Abstract
A new type of linear motor using a multilayered piezoelectric actuator has been developed. The slider consists of a multilayered piezoelectric actuator and a vibratory fork. An elliptical motion is generated at the end of legs of the vibratory fork. The slider can move by means of the frictional force at the leg tips and the moving direction can be controlled by changing the drive frequency. This motor is very compact (23mm × 13.5mm × 5mm in size) with higher power (conveyable weight > 1kgf).