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Abstract
We developed a new structure gas sensor using a new type of pyroelectric IR detector which contains a pyroelectric element (LiTaO3) and a small chopper using a piezoelectric material in the same package.
The accuracy of measurement is ±0.2% in the 0 ∼ 20% concentration range of CO2 gas. The change in the output signal is within ±0.5% in a temperature range of 0 ∼ 40°C.
The accuracy and stability of the new gas sensor are superior to those of the conventional non-dispersive IR gas sensor due to the new structure and the new type of pyroelectric IR detector.