Synthesis of ferroelectric thin films and ceramics from solution processes

Abstract

sol-gel method has been investigated for synthesis of ferroelectric PbZr_1−xTi_xO₃ (PZT) thin films using a precursor solution of alkoxides. The precursor is modified with acetylacetone in order to decrease its sensitivity towards hydrolysis. The sol with low viscosity is deposited onto platinized silicon substrate by spin-coating. Sols with different x ratios have been studied in order to compare the reactivities of zirconium and titanium precursors. Techniques like infrared spectroscopy and x-rays diffraction have been used in order to characterize the synthesis steps from the alkoxide to the final ceramic films. Finally, electrical measurements have been made on the film, showing the influence of pyrochlore phase for the Zr rich composition.