Compositional and microstructural characterization of rfmagnetron-sputtered lead zirconate titanate thin films

Abstract

The growth of ferroelectric lead zirconate titanate (PZT) films by rfmagnetron-sputtering using a Pb(Zr,Ti)O₃ target is described. This study has been focused on producing perovskite thin (<200nm) films on different substrates. Depositions were perfomed at room temperature and the process gas is pure argon (0·5–3 Pa). The effects of deposition and post-annealing conditions on film composition and microstructure were evaluated using Rutherford Backscattering Spectroscopy (RBS), Nuclear Reaction Analysis (NRA), null ellipsometry and X-ray diffraction. Optimization of process conditions is discussed in terms of stoichiometry, structure and their reproducibility.