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Abstract
The structure of Pb(Zr, Ti)O3 films grown on u-Al2O3 (0112) substrates by the RF-sputtering and annealed in the PbO atmosphere has been studied by X-ray diffraction and TEM methods. The Pb(Zr, Ti)O3 phase has been found to be of the perovskite type structure. The films had the strongly pronounced texture formed by large grains with the (110) axis oriented nearly normal to the substrates. The values of the grain size and the grain misorientations have been obtained by TEM. TEM microdiffraction analysis showed the growth of Pb(Zr, Ti)O, grains to be the epitaxial one.