Preparation of PLT films by reactive electron beam coevaporation

Abstract

Lanthanum modified lead titanate (PLT) thin films were prepared by reactive coevaporation of lead, lanthanum and titanium with an electron beam gun Each of evaporation rates of lead, lanthanum and titanium was independently controlled by each quartz crystal thickness monitor. To promote oxygenation of deposited films, mixture gas of oxygen and ozone was used. A perovskite phase PLT was obtained at substrate temperature of 550°C without post thermal annealing on a glass substrate. Deposition rate was 50nm/min, which was much larger than that of prepared by sputtering method. According to the increase of lanthanum content, axial ratio c/a decreased. The PLT film was more transparent than the PbTiO₃ film which was deposited on same conditions.