Structural properties and effect of excess pb on pb(zr_0.52ti_0.48)o₃ thin films prepared by sol-gel processing

Abstract

Pb(Zr_0.52Ti_0.48)0₃ stock solution prepared by sol-gel processing was spin-coated on Pt/SiO₂/Si substrates and annealed by RTA (Rapid Thermal Annealing). The crystal structure and the growth mechanism of the films were proposed based on the observation of crystallization process and microstructure of the films fabricated with different conditions, and the effects of excess Pb addition were studied. Films were crystallized into rhombohedral structure by annealing at 550°C for 60 sec or 600°C for 20 sec. The grain size of the film increased as the annealing temperature increases and the films were grown into columnar structure perpendicular to the substrate. The degradation of electrical properties due to Pb loss during RTA annealing was observed, and the addition of 10 wt% of excess Pb to the stock solution could compensated the Pb loss.

Key Words:

• Pb(Zr,Ti)O₃ thin film
• sol-gel processing
• rapid thermal annealing
• crystallization
• grain size
• hysteresis loop.