13
Views
0
CrossRef citations to date
0
Altmetric
Original Articles

Barium strontium titanate thin films by metallo organic solution deposition technique for dram applications

, &
Pages 139-143 | Received 05 Oct 1995, Published online: 07 Mar 2011
 

Abstract

Barium strontium titanate thin films were fabricated by metallo-organic solution deposition (MOSD) technique using acetate precursors. The films were characterized in terms of structural, electrical, and interfacial properties.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.