Preparation of highly oriented KTN/SrTiO₃(111), KTN/SrTiO₃(100) thin films by Sol-Gel method

Abstract

Abstarct Highly oriented perovskite KTN/SrTiO₃(100)thin films were perpared by Sol-Gel method from KOCOCH₃, Ta(OC₂H₅)₅ and Nb(OC₂H₅)₅. The crystallization process of KTN thin films on SrTiO₃ substrate was studied by XRD. Some technical parameters such as the solution concentration, viscoaity, catalyst, heat treatment temperature, heating and cooling rate, and O₂ flow were determined by the experiments, at the same time, the lattice constant, thermal expansion coefficient and chemical stability of substrate which influenced the structure and quality of KTN films were also discussed