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Abstract
A CSD process with water-based precursor solutions for barium strontium titanate (BST) thin films is presented. The water-based BST solutions suitable for the CSD were made from barium acetate, strontium acetate or barium carbonate, strontium carbonate, and tetrabutyl titan-ate. Water was used as a solvent. The influenced factors for the stability in the precursors are discussed. X-ray diffraction analysis showed that the BST thin films obtained from the water-based solution have pure perovskite structure. The results of microstructure and dielectric properties of the BST thin films demonstrate that the water-based precursor solutions for the BST thin films are available in CSD process.