Structural and optical properties of waveguides of sol-gel deposited ferroelectric PZT(50/50) thin films

Abstract

PZT(50/50) ferroelectric thin films were deposited by the sol-gel method. The refractive index emerging from Si(111) and fused quartz glass substrates were measured and calculated by ellipsometry and optical transmission spectra, respectively. The relationship between structure and refractive indices was studied. Alter heat treatment the PZT films on silicon and platinized silicon substrates revealed that the structure plays a major role in variation of the refractive index. The optical waveguide losses of thin films were measured using the prism-waveguide coupling technique. The relationship between optical waveguide loss and preparation technology were also studied. The waveguide loss of the films is increased with increasing of the heat treatment temperature. With increasing of coating thickness the waveguide loss is not significantly increased.

Key Words:

• Sol-gel
• thin film
• structure
• waveguide loss