Highly configurable capacitive interface circuit for tri‐axial MEMS microaccelerometer

Abstract

A highly configurable capacitive interface circuit with on‐chip calibration capability for tri‐axial microaccelerometer is presented. The capacitive interface circuit is designed to be programmable, and can reduce the output errors due to the parasitic capacitance variations and process variations. The capacitive sensing chain adopts the chopper stabilisation, and includes the front‐end charge amplifier with three 10‐bit programmable capacitor arrays, 9‐bit digital‐to‐analogue converter and 10‐bit programmable gain amplifier. The calibration coefficients are stored to the on‐chip erasable programmable read only memory. The outputs from the three‐channel capacitive sensing chain are converted to digital signal by the integrated 14‐bit algorithmic analogue‐to‐digital converter. After calibrating the 48 samples, all the samples meet the desired specification range. Before the calibration, the errors of the average values of the output offset and gain were +47.1% and −85.9%, respectively. After the calibration, however, the errors of the average values of the output offset and gain are reduced to be 0.3% and 0.5%, respectively. The resolutions for x/y‐axis and z‐axis are measured to be 326 and 728 µg, respectively.

Keywords:

• microaccelerometer
• capacitive sensing
• calibration
• programmable circuit
• MEMS

Acknowledgement

This study was financially supported by the research fund of Chungnam National University in 2010.