Optimal vehicle allocation for an Automated Materials Handling System using simulation optimisation

Abstract

The Automated Materials Handling System (AMHS) in the semiconductor industry plays a vital role in reducing wafer cycle times and enhancing fabrication facility (fab) productivity. Due to the complexity of the manufacturing process and the stochasticity introduced by the inherent variability of processing times, the vehicle allocation for the AMHS is a challenging task, especially in 300 mm wafer fabs where the AMHS comprises both the interbay and intrabay systems to perform the timely deliveries. This paper studied the vehicle allocation problem in a typical 300 mm wafer fab. We formulated it as a simulation optimisation problem and proposed a conceptual framework to handle the problem. A discrete event simulation model was developed to characterise the AMHS, and the technique of simulation optimisation was applied to obtain the optimal vehicle allocation for both the interbay and intrabay systems. To demonstrate the feasibility and advantages of the simulation optimisation approach, a photobay example was used to compare the solution derived from the analytical model and simulation optimisation model. Finally, an empirical problem based on real data was conducted to show the viability of the proposed framework in practice.

Keywords:

• Automated Materials Handling System (AMHS)
• semiconductor manufacturing
• simulation optimisation

Acknowledgement

This research is supported in part by the Advanced Manufacturing and Service Management Center at National Tsing Hua University and National Science Council in Taiwan (NSC99-2221-E-007-038-MY2).