Control of dynamic microsystems

Abstract

This paper formulates and solves control problems for nonlinear microsystems which comprise micro-electromechanical devices, micromachined transducers and microelectronics. We perform a consistent dynamic analysis and coherent designs with a minimum level of simplifications using high-fidelity mathematical models. The proposed methodology enables practical implementation for multi-input/multi-output systems due to overall conceptual consistency, design coherence, computational efficiency, algorithmic effectiveness and hardware simplicity. Various issues in nonlinear analysis and control are examined and experimentally verified substantiating design concepts for high-performance microsystems. The reported findings are demonstrated for a proof-of-concept closed-loop electrostatic microactuator.

Keywords:

• analysis
• control
• Lyapunov theory
• micro-electromechanical systems
• microsystems
• optimisation

Additional information

Notes on contributors

Sergey Edward Lyshevski

Sergey Edward Lyshevski was born in Kiev, Ukraine. He received MS (1980) and PhD (1987) degrees from Kiev Polytechnic Institute, both in electrical engineering. From 1980 to 1991 Dr Lyshevski held faculty positions at the Department of Electrical Engineering at Kiev Polytechnic Institute and the Academy of Sciences of Ukraine. From 1989 to 1991 he was the Microelectronic and Electromechanical Systems Division Head at the Academy of Sciences of Ukraine. From 1992 to 2002 he was with Purdue School of Engineering as an associate professor of electrical and computer engineering. In 2002, Dr Lyshevski joined Rochester Institute of Technology as a professor of electrical engineering. Dr Lyshevski served as the full professor at the Air Force Research Laboratories and the senior faculty fellow at the US Surface and Undersea Naval Warfare Centers. He is the author and co-author of 16 books, edited 2 handbooks, editor-in-chief of Encyclopaedia of Nanoscience and Nanotechnology, and published more than 350 journal articles, handbook chapters and regular conference papers. His current research activities are in the areas of microsystems, micromechatronics, micro-electromechanical systems, nanotechnology, information technologies and systems informatics. Dr Lyshevski has made a significant contribution in design, analysis, optimisation and deployment of advanced aerospace, automotive, electromechanical and naval systems. He has developed knowledge base, conducted transformative research, performed engineering developments, and advanced core information technologies with applications. Dr Lyshevski made more than 50 keynote and plenary talks.