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Abstract
Electrohydrodynamics patterning is a process for electrically duplicating micro–nano patterns on polymer films by applying an electrical field. An investigation into the hydraulic behavior of the polymer as affected by the template-modulated electrical field is critical for understanding the process capability and template design. A coupling model is presented to characterize the influence of template geometry on the pattern duplication. The transient simulation is carried out to study the formation of a pattern. It is proposed that the electrical field modulated by the template can be divided into a spatially nonhomogeneous component which generates the periodic pillars undesirably and a spatially nonhomogeneous component which generates a duplication of the template pattern as desired. We find that the template geometry has a significant effect on the template-modulated electrohydrodynamics. A high-fidelity duplication of pattern is better suited to a low projection ratio, a decreased template spacer height, and an increased pattern aspect ratio.
Acknowledgments
This research was supported by the National Basic Research Program of China (Grant No. 2009CB724202) and the National Natural Science Foundation of China (90923040).