Photographic techniques for microelectronics

Paper presented at a symposium on “Quantitative Applications of Photography” organized by the Science Committee of The Royal Photographic Society, 6 December 1976 in London

Abstract

In the last twenty years, the electronics industry has adapted extreme resolution photography and photoresist methods to the development of manufacturing techniques of extraordinary power and refinement. Most accounts are written from the viewpoint of the electronics engineer. This is the same story reviewed for the photographic scientist.

Notes

Paper presented at a symposium on “Quantitative Applications of Photography” organized by the Science Committee of The Royal Photographic Society, 6 December 1976 in London