Quantitative Examination of Photofabricated Profiles Part 1: Design of Experiments

Abstract

To obtain a detailed observation of the process of photoetching, metal foil samples bearing photoresist stencils were etched for a series of times from first surface "bite" on to breakthrough. Profiles were then examined after metallographic sectioning. To facilitate extraction of the desired information, the etched patterns comprised a series of parallel lines of increasing width, so that all line widths could be seen in a single section. In mounting for sectioning, special means were used to hold the metal and the etched lines strictly vertical and to ensure good edge retention on subsequent metallographic polishing. Methods for quantitative evaluation of the profiles so revealed are also discussed.