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Original Articles

Dual ion implantation in ZnTe (O + Zn) interaction between solubility and stoichiometry

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Pages 183-191 | Received 19 Oct 1978, Published online: 13 Sep 2006
 

Abstract

The stoichiometry of compound semiconductors interacts with the solubility of impurities. Oxygen impurity in ZnTe is a good element for solubility studies because oxygen doped ZnTe exhibits a well characterized luminescence spectrum. It is shown that Zinc implantation in nominally undoped ZnTe brings out an oxygen-related luminescence spectrum, revealing some previously inactive oxygen impurities.

Furthermore oxygen can be introduced in ZnTe by ion implantation but oxygen dissolution in Te sites is much more complete if a dual implantation (O + Zn) is carried out.

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