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Original Articles

On the energy distribution and angular distribution of sputtered particles

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Pages 137-143 | Received 01 Jan 1980, Published online: 19 Aug 2006
 

Abstract

The influence of the anisotropy of the momentum recoil density of collision cascades in solids on the energy and angular distribution of sputtered particles is considered. Various sputtering mechanisms are discussed. For some of those mechanisms this anisotropy leads to deviations from a ε−2 asymptotic form in the energy distribution and to an asymmetry in the angular distribution as a function of the angle of incidence of the projectile.

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