Abstract
The method of electron Auger-spectrometry is used to study the composition of the sputtered A(111) and B(―1―1―1) faces of InSb dendrites and the deposits sputtered from them. The obtained noticeable anisotropy of the In and Sb distribution within ejection angles ± 50° to <111> directions has been found to be in good qualitative agreement with the results of computer calculations. It has been shown that the observed compositions of the dendrites and films vary depending on sputtering time.