Computer simulation of single-crystal and polycrystal sputtering—III

Abstract

This part of the work completes the discussion of the results of computer simulation of Cu single-crystal and polycrystal sputtering by 27-keV Ar ions. Sputtering due to <110> linear collision chains is investigated here in detail. The effects of thermal vibrations and simultaneous collisions (lens focusing) on the parameters of the <110> collision chains are discussed. The energy spectra of atoms sputtered by the <110> collision chains of various types and the data concerning the initial formation stage of the <110> collision chains are presented. The characteristic energies in the spectra of atoms sputtered by pure focused and mixed (focused-defocused) collision chains have been shown to be different. Collision chains along an isolated Cu <110> atomic row are calculated as a subsidiary problem. The ranges of initial angles and energies pertaining to various types of collision chains have been found. The hard-sphere approximation and the many-body integration method were also used in some of the calculations for the sake of comparison. The angular dependence of the single-crystal sputtering yield studied in Part 1 of the work is discussed again in the light of new experimental data.