Empirical formulas for the backscattering coefficients of light ions obliquely incident on solids

Abstract

The dependence on the angle of incidence θ of the number-backscattering coefficient Rn and the energy-backscattering coefficient Re of H, D and He ions has been found to be fitted by the expression R(θ)=R(0°) + [1-R(0°)]/(1 +A1 cot2A2θ), where R represents either Rn or RE and the parameters At (i = 1,2) are functions only of the Thomas-Fermi reduced energy ε. By using the semiempirical formulas of Tabata et al. for R(0°), universal formulas for R(θ) have been obtained These formulas are valid for all the mass regions of the target atom and for 2 × 10–2 ≲ ε ≲ 10.