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Short Communication

Angular dependences of sputtering ratio, ion-electron emission coefficient and ion-induced photon emission yield at oblique ion incidence on crystalline targets

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Pages 313-318 | Received 04 Sep 1984, Published online: 19 Aug 2006
 

Abstract

The angular dependences of the sputtering ratio, ion-induced photon emission yield and the ion-electron emission coefficient for two faces of a copper'crystal at glancing angles of ion incidence on the targets has been experimentally studied.

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