Spectroscopic Measurements of Electron Temperature and Electron Density in Electron Beam Plasma Generator Based on Collisional Radiative Model

Abstract

The current work describes a spectroscopic method for determining the electron temperature and electron density in an electron beam generator using argon spectral lines based on a collisional radiative model. Neutral and first‐ionized Ar lines emitted from the electron beam generator are studied experimentally. A collisional radiative code was developed to simulate the Ar (I) and Ar (II) spectral emission and to compare the results with the experimental data for electron density and temperature determination. Ar lines and excited level densities were calculated by solving rate equations using the Gauss elimination method. The argon spectrum is recorded experimentally by superposing two discharges, namely a low pressure DC glow discharge and a high current pulsed discharge. Spectral lines between 350 nm and 950 nm were recorded using an integrated signal technique on a charge‐coupled device. Electron temperature is determined by the relative intensity ratio method of two spectral lines. The relative intensity ratios of each peak are compared in a specific pressure range at various values, and good correlation is reported.

Keywords:

• Collisional radiative model
• electron beam
• emission spectroscopy