Spectroscopic Measurements of Plasma Temperatures in a Radio Frequency Discharge

Abstract

Argon and mixtures of argon with CH₄, C₂H₂ and N₂ have been excited in a 27.2 MHz radio frequency discharge at pressures of 10 and 5 Torr. Plasma spectra have been recorded and analyzed. The excitation temperatures of Ar I and H, the C₂ and CN vibrational temperatures and the N₂ and CN rotational temperatures have been determined and discussed.

Key Words:

• plasma temperature
• excitation temperature
• vibrational temperature
• rotational temperature
• radio frequency discharge