25
Views
19
CrossRef citations to date
0
Altmetric
Original Articles

Radiative heat transfer with quasi-monte carlo methods

, &
Pages 1001-1021 | Received 01 Mar 1993, Accepted 04 Oct 1993, Published online: 13 Sep 2006
 

Abstract

Monte Carlo simulation is often used to solve radiative transfer problems where complex physical phenomena and geometries must be handled. Slow convergence is a well-known disadvantage of such methods. In this paper we demonstrate that a significant improvement in computation time can be achieved by using Quasi-Monte Carlo methods to simulate Rapid Thermal Processing, which is an important technique for the production of semiconductor wafers, as well as many other industrial processes. Several factors are considered including surface absorptivity, position of wafer surface to heat source, and choice of quasi-random sequence. A comparison of the fractional and discrete absorption methods is also made. Results show accelerated convergence and improved accuracy of QMC over the standard Monte Carlo approach, and indicate when the fractional and discrete absorption methods should be used to obtain optimal results.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.