Pulsed laser deposition of Pb(Zr_0.52Ti_0.48)O₃ thin film on cobalt ferrite nano-seed layered Pt(111)/Si substrate: effect of oxygen pressure

Abstract

The effect of oxygen pressure during pulsed laser deposition of Pb(Zr_0.52Ti_0.48)O₃ (PZT) thin films on CoFe₂O₄ nano-seed layered Pt(111)/Si substrate was investigated. The PZT film deposited at oxygen pressure lower than 25 mTorr is identified as both perovskite and pyrochlore phases and the films deposited at high oxygen pressure (50-100 mTorr) show the single-phase perovskite PZT that has a perfect (111)-orientation. In addition, the film deposited at P_O2 of 50 mTorr has a uniform surface morphology, whereas the film deposited at P_O2 of 100 mTorr has a non-uniform surface morphology and more incompacted columnar cross-section microstructure. The polarization of film deposited at 100 mTorr is higher than that deposited at 50 mTorr, but shift of the hysteresis loop along the electrical field axis in the film deposited at P_O2 of 100 mTorr is larger than that of the film deposited at P_O2 of 50 mTorr.

Keywords:

• PZT
• (111)-orientation
• thin film
• CoFe₂O₄
• oxygen pressure
• pulsed laser deposition

Additional information

Funding

M. Khodaei is grateful for the financial support of Department of Materials Science & Engineering and Ferroelectric Nano Materials Lab at POSTECH.