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Philosophical Magazine A Volume 57, 1988 - Issue 5
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Original Articles

Properties of in and p subcascades in a crystalline ion-implanted InP target

A. M. Mazzone Istituto di Chimica e Technologia dei Materiali e dei Componenti per L'Elettronica (LAMEL), Consiglio Nazionale delle Ricerche, Via de Castagnoli 1, 40126, Bologna, Italy
Pages 741-747 | Accepted 04 Sep 1987, Published online: 20 Aug 2006
 
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Abstract

Results of a Monte Carlo simulation of the damage formation in a crystalline InP target are reported. The simulation analyses the features of the two recoil populations for different orientations of the target.

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