Hydrogenated amorphous silicon on soda-lime glass substrate: Correlation between sodium contamination and porosity of the films

Abstract

electrical and optical properties of a-Si: H films deposited on Coming 7059 and soda-lime glass substrates have been studied. The obtained difference in the values of the measured parameters implies that the latter samples are contaminated with sodium. It has been established that the amount of micropores affects the penetration of sodium from the soda-lime glass substrate as a higher micropore density leads to a lower sodium contamination of the a-Si: H films.