Abstract
Polytyoid structures in the AIN crystals containing oxygen were investigated by electron diffraction and high-resolution electron microscopy. The polytypoids were revealed to consist of flat and corrugated inversion domains. The flat inversion domain boundaries were found to have three different interfacial structures. The distance between two neighbouring flat inversion domain boundaries was found to be either 5c or (5 ± 0.5)c, where c is the lattice parameter along the c axis of the wurtzite 2H-A1N crystal. Structural models which explain well the electron diffraction patterns and high-resolution electron microscopy images of the polytypoids are proposed.