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Abstract
Quantative elemental microanalysis of the cation composition in ceramics was examined by ultrathin-window-type energy-dispersive X-ray spectroscopy (EDS) in a transmission electron microscope. One object of this investigation was the development of a quantitative analysis method by which absorption correction can be carried out. Another was to determine how anions in ceramics are treated in quantitative elemental analysis. The two-beam intensity ratio method was improved for ceramics and the method by which the absorption effect of anions is taken into consideration and the concentration of anions is not analysed was developed. This method is the best way to determine the composition of cations and foil thickness. It was shown that the quantitative accuracy of anions is not very good and that quantitative elemental analysis of anions is somewhat difficult using EDS, in a transmission electron microscope.