Abstract
An observation of diamond nanocrystal nucleation in the course of hydrogenated amorphous carbon film growth under ion sputtering of graphite is reported. Transmission electron microscopy (TEM) (100 keV), selected-area electron diffraction and optical absorption (1–6 eV) studies of the prepared hydrogenated amorphous carbon films were performed to characterize their structure. A size distribution function of diamond nanocrystals is derived from TEM images. The optical data are analysed in terms of the medium-range order present in the film. A mechanism for the nucleation of diamond nanocrystals is discussed.