A comparison of three versions of sigmund's model of sputtering using experimental results

Abstract

Two modifications of Sigmund's sputtering formula, viz. by Bohdansky and by Yamamura et al. are compared with an α-adaptation of Sigmund's original formula to 620 experimental sputtering yields taken from literature. Using the α-values for the comparison, it was found that the considerable scatter of these values (averaged for given M₁, Z₁, M₂, Z₂) is not reduced by either of the two modifications, except for values in the range M₂/M₁ > 100. In each of the three versions the scatter is systematic, however, in as far as certain target elements yield average values of α which are consistently high, low or intermediate over a wide range of M₂/M₁ ratios.